Wednesday, November 14, 2018 |
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SCREEN – Enabling Technology Diversification in Europe
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10:00 |
Introduction and Welcome |
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Dr. Oliver Vatel, CTO, SCREEN Semiconductor Solutions Co., Ltd.
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Equipment Solution for Power Devices
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10:10 |
Ion Implantation Solutions for Power Devices |
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Ron Reece, AXCELIS Technologies
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10:30 |
Ultrafast UV Annealing Solution for Si, SiC and GaN Power Devices |
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Dr. Fulvio Mazzamuto, SCREEN LASSE
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SCREEN R&D and JDP Collaboration
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10:50 |
Advanced wet processes for 3nm devices |
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Dr. Frank Holsteyns, IMEC
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11:20 |
FDSOI presentation |
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Dr. Nicolas Daval, SOITEC
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New Equipment Presentation
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11:50 |
ZI-3500 presentation |
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Rosario Di Stefano, STMicroelectronics
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12:10 |
SU-3300 - Advanced Single Wafer Clean |
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Dr. Martin Hollfelder, SCREEN
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12:30 |
End |