Abstracts listed by sessions

Monday, November 12, 2018
	Networking Reception
19:30	Restaurant LEHEL
	Karl- Scharnagl Ring 6-8, 80538 München » weblink

Tuesday, November 13, 2018
Market Presentation
11:00	Welcome
11:05	TBA
	Lara Chamness, Senior market analyst for industry research and statistics, SEMI
Session 1	Flexibility as Key Element for European Manufactures
11:30	MEMS – One Product one process?
	Udo Gómez, Senior Vice President, Robert Bosch GmbH close MEMS – One Product one process? Udo Gómez Senior Vice President Robert Bosch GmbH Abstract The demand and variety of applications for MEMS sensors has been growing steadily since the first series applications in the automotive sector in the early 1990s. Especially since the rise of fast-moving consumer markets, quick and efficient design has become increasingly important. However, in particular for MEMS, the strong interaction of product design and manufacturing processes is a major challenge. The growing number of applications for sensing of various physical and increasingly chemical parameters, often require specific solutions in MEMS production, chip level packaging and component testing as well. Fast and market-driven product development is only possible through innovative design concepts and the provision of modular process building blocks. A deep understanding of the interrelationships and the development of corresponding simulation tools are further key competencies. As market leader in MEMS sensor business and one of the first MEMS pioneers, BOSCH is continuously pushing forward the development of MEMS technology. The extension of our process platform originally defined for automotive applications to consumer products opens up new possibilities in the realization of complex 3D structures. This enables new product designs that are reflected in high-performance sensors for both automotive and consumer electronics applications. The presentation gives a short overview of the different requirements on MEMS technology compared to standard IC design and manufacturing. It provides insights into the future development in the field of surface micromechanics and highlights challenges and solutions of MEMS technology development and manufacturing as well as design methodology. In addition, we give examples of new design and product concepts and finally question: Does the old MEMS law "one product, one process" continue to apply? Biography Dr. Udo-Martin Gómez Senior Vice President Sensor Engineering, Robert Bosch GmbH Dr. Gómez is Senior Vice President of Robert Bosch GmbH. He is heading the Sensor Engineering at Bosch Automotive Electronics (AE/NE-SE) in Reutlingen, Germany, the world’s largest MEMS supplier serving the Automotive, Consumer Electronics and IoT industry. Having completed his doctorate in physics, Dr. Gómez started his career at Robert Bosch GmbH in 1999 at Corporate Sector Research and Advanced Engineering (MEMS technology). Before joining Bosch Automotive Electronics in April 2018, he worked in various management positions at Bosch and also held the position of Chief Expert for MEMS sensor technology. From 2013 to March 2018, he was Chief Technical Officer of Bosch Sensortec GmbH - a fully-owned subsidiary of Robert Bosch GmbH, responsible for research and development of micro-electro-mechanical sensors (MEMS) for consumer electronics, smartphones, security systems, industrial technology and logistics. Since 2014, Dr. Gómez is Deputy Chairman of the Board of VDE/VDI-Society Microelectronics, Microsystems and Precision Engineering (GMM). Since 2015, he is also member of the GSA (Global Semiconductor Alliance) EMEA Leadership Council.
11:55	LUNCH
12:45	The MEMS production challenge: How to manage an increasing MEMS production and complex R&D activities within a combined CMOS-MEMS foundry fab?
	Volker Herbig, VP BU MEMS X-FAB Group, X-FAB MEMS Foundry GmbH close The MEMS production challenge: How to manage an increasing MEMS production and complex R&D activities within a combined CMOS-MEMS foundry fab? Volker Herbig VP BU MEMS X-FAB Group X-FAB MEMS Foundry GmbH Abstract How the CMOS foundry business model runs is well understood: a process technology is developed, a corresponding PDK is created and given to customers, followed by the product development at their side. At this point many customers can be served at the same time. This helps to achieve a high level of fab utilization and to minimize costs and risks. This model does not apply exactly for MEMS – the MEMS business model is different. Process as well as product development are very mostly customer specific and take place simultaneously for different customers within a running foundry production fab environment. On the one hand this is the key to short time to market and to robust production processes as no extra industrialization stage is needed after technology development. On the other hand this is generating various special challenges. This presentation especially talks about those challenges the fab team has to address besides the ongoing CMOS and MEMS production: - tool dedication and tool stability / matching in relation to production and empty costs - advanced metrology concepts including PCM and automatic optical outgoing inspection - process engineering support model in complex and fast running MEMS development projects … and many more. These challenges can be mastered by a deep process understanding and good process integration schemes, both based on intensive collaboration of production and development departments. Biography Volker Herbig, VP BU MEMS at X-FAB, oversees all MEMS activities within the X-FAB Group. Before assuming his current role, Volker worked as Director Product Marketing at X-FAB. Previously he held also engineering, marketing and management positions at Siemens, Inkjet Technologies and Carl Zeiss where, among other activities, he developed MEMS inkjet print heads and was responsible for setting up a manufacturing facility for those. Volker Herbig holds a master’s degree in physics from Humboldt University, Berlin, Germany.
13:10	Next Generation of Powerful Intralogistics Automation for 200MM Semiconductor Fabs
	Heinz Martin Esser, Managing Director, Fabmatics GmbH close Next Generation of Powerful Intralogistics Automation for 200MM Semiconductor Fabs Heinz Martin Esser Managing Director Fabmatics GmbH Abstract Existing 200mm semiconductor fabs can master the challenges of a 24x7 production under highest cost and quality pressure by implementing intralogistics automation solutions. In the previous years many companies operating mature fabs understood that older does not mean obsolete and started or continued their journey towards higher automated production. Fabmatics developed a variety of automation solutions in the fields of material identification and tracking, storage, transport and handling. After the first generation of these automation systems entered the fabs, left the prototype level and have been running in production for a couple of years the customer needs and requirements changed. Focused the first material handling automation solutions on general feasibility the trend now develops towards continuous improvement, stability, performance and cost of ownership, which creates new and different challenges for automation suppliers like Fabmatics. In his presentation Heinz Martin Esser will explain the newest trends of customer requirements for automation of mature fabs and how Fabmatics is tackling these challenges by developing the 2nd generation of intralogistics automation systems, which will gives the customers the opportunity to further stretch the current limits of fab performance. Biography Managing Director of Fabmatics GmbH and President of Silicon Saxony e.V. Heinz Martin Esser, born in 1955, completed his studies of supply engineering at the university of applied science in Cologne with diploma in 1981. In 1985 he got an additional university degree in business administration. He gained a wide experience in detailed engineering and project management for large and complex investments for nuclear industry and beverage and food industry. Later he was assigned as branch manager to build production clean rooms and facilities in semiconductor and pharmaceutical industry. In 1999 he was appointed as CEO of Roth & Rau - Ortner GmbH, Dresden (formerly Ortner c.l.s. GmbH). The company provided automated transport, storage and handling systems, RFID components and special products for cleanroom applications as well as complex systems expertise in AHMS installation and qualified services for the international semiconductor industry. Since the merger of Roth & Rau - Ortner GmbH and HAP GmbH Dresden into Fabmatics GmbH in September 2016, Heinz Martin Esser has been managing the company together with Dr. Steffen Pollack. With Fabmatics Heinz Martin Esser is responsible for “Sales & Marketing”, “Customer Service” and “Administration”. Since 2001 Heinz Martin Esser has been a member of the board of directors of the high-tech network Silicon Saxony e.V. In 2009 he was assigned to be the speaker of the board. Since 2008 he has been a member of the European Advisory Board of the worldwide industry association SEMI as well.
Session 2	Attractive through Organizational Innovation – Sharing Best Practices
13:35	Keynote
	Innovation needs People Power
	Glenn van der Burg, Founder, People Power close Innovation needs People Power Glenn van der Burg Founder People Power Abstract What can make a real difference between you and your competitor? Cutting edge technology? A strong brand? Cost efficiency? Especially in this era of super fast tech development, the one thing that we need to thrive is People Power. Innovation, creativity, customer intimacy, they all rely on engaged people that cooperate to be better everyday. Probably nothing new, but why is it so hard to create a workplace that is bursting with energy? In this talk, Glenn van der Burg will take you on a trip into the drivers for human behavior. What motivates us to be the best version of ourselves? What's happening to people in meetings? What sparks people's creativity? And what takes away all the energy? With insights from science, examples of innovative organisations and actions to start innovating your workplace tomorrow. And at least one guaranteed laugh! Biography As founder of People Power, Glenn van der Burg is striving for people-centric organizations for better performance and happy people. He facilitates groups of leaders and professionals that want to make a leap forward in making their organization people centric. Every monday Glenn hosts his radioprogram "People Power" with experts and best practices in people-centric organizations. And he is the author of two management books. His favourite quote is by prof. Gary Hamel: “You can not build an organization fit for the future if it is not fit for human beings."
14:05	From Lean Manufacturing to Lean Everywhere
	Olivier Ardesi, Central Manufacturing Lean Program Manager, ‎STMicroelectronics
Poster Session	What Makes Organizations Innovative and Why Does this Make Manufacturing Attractive?
14:30	Introduction
14:35	Smart Vocational Training: Infineon Dresden attracts Generation Z …
	Lutz Lippmann, Infineon
14:40	TBA
	Henryk Schoder, Vice President HR, X-Fab Group
14:45	TBA
	Carsten Deuper, Production Manager, NXP Semiconductors
14:50	Per aspera ad astra - innovation in a mature fab
	Alexander Urban, Unit Manager, Texas Instruments close Per aspera ad astra - innovation in a mature fab Alexander Urban Unit Manager Texas Instruments Abstract It will be shown, that innovation in a mature fab needs a combination of neccessity, good leadership and people with the proper mindset. All items will be discussed in detail with examples. Biography Alexander started 1999 as a photo process engineer at Hitachi Semiconductor. He joined Texas Instruments in the same position in the year 2000. In 2009 he took over the position of an engineering section head for photo and yield enhancement. In 2016 Alexander extended his leadership to process engineering, equipment engineering and manufacturing of photo, epi and implant. Alexander holds several patents and is responsible for driving innovation in Texas Instruments Freising fab.
14:55	Digital transformation of semiconductor design to manufacturing processes
	TBA, Dassault Systèmes
15:00	Enabling Productivity and Performance Through Equipment Intelligence™
	Katrina Bomont, Lam Research
15:05	Smart Manufacturing enabled by Silicondash - A Big Data and Machine Learning web-based Application
	TBA, Qualtera
15:10	Predictive/Preventive Maintenance + Fab-Planning 4.0, via Augmented reality solutions
	Tobias Bausch, Director Sales & Marketing, AP&S
15:15	Poster session & Coffee break
15:55	Voting of best poster with lucky draw
Final Keynote
16:00	Keynote
	TBA
16:30	End

Networking Reception

Flexibility as Key Element for European Manufactures

MEMS – One Product one process?

MEMS – One Product one process?

The MEMS production challenge: How to manage an increasing MEMS production and complex R&D activities within a combined CMOS-MEMS foundry fab?

The MEMS production challenge: How to manage an increasing MEMS production and complex R&D activities within a combined CMOS-MEMS foundry fab?

Next Generation of Powerful Intralogistics Automation for 200MM Semiconductor Fabs

Next Generation of Powerful Intralogistics Automation for 200MM Semiconductor Fabs

Attractive through Organizational Innovation – Sharing Best Practices

Keynote

Innovation needs People Power

Innovation needs People Power

What Makes Organizations Innovative and Why Does this Make Manufacturing Attractive?

Per aspera ad astra - innovation in a mature fab

Per aspera ad astra - innovation in a mature fab

Keynote

TBA