Powering the Future with 8-Inch SiC Technology Across the Voltage Spectrum
Xiao Gong
A*Star
Abstract
Silicon carbide (SiC) power devices are key enablers for the next generation of high-efficiency and high-voltage power electronics. In this work, we present our latest progress from A*STAR in developing an 8-inch SiC power device technology platform, spanning a broad range of voltages from 400 V to more htan 10 kV.The platform encompasses the fabrication and characterization of 8-inch SiC planar MOSFETs, trench MOSFETs, superjunction MOSFETs, and Fin-MOSFETs, with a strong focus on improving device performance, scalability, process integration, and manufacturability on large-area wafers. In addition, the development of 6.5 kV SiC PiN diodes will be presented to address the requirements of high-voltage and high-power systems. Key advances in device architecture, process technology, and electrical performance will be highlighted, demonstrating the potential of 8-inch SiC technology to enable future energy-efficient power conversion systems for automotive, data-center, renewable-energy, grid, and industrial applications.
Biography
Prof. Xiao GONG is currently the Head of Department for Power Electronics in the Institute of Microelectronics, A*STAR, and is concurrently the GlobalFoundries Chair Associate Professor in the ECE Department of the National University of Singapore (NUS). He obtained his Ph. D Degree from NUS in 2023 and was a Visiting Scientist at MIT in the year of 2014. His research interest includes advanced transistors and emerging memories for in-memory computing, ultra-wide bandgap power device technology, monolithic 3D integration, and opto-electronic integrated circuits. He has won many awards, including the Bronze Medal at the 6th TSMC Outstanding Student Researcher Award, the Best Student Paper Award at VLSI Symposium (2017, 2021, 2024, and 2026), the Best Demo Paper Award at VLSI Symposium (2022, 2023, and 2025), the Best Paper Award in EDTM (2025), the Best Student Paper Award at ICICDT (2019, 2021, 2023, and 2024), Emerging Leaders in Journal of Physics D 2021, and NUS Engineering Teaching Excellence Award (2018, 2023, and 2024). He has more than 450 publications in international journals and conferences, including more than 120 papers in IEDM and VLSI Symposium. He has delivered over 40 short courses/tutorial/invited talks in major conferences, including DRC, EDTM, VLSI-TSA, SSDM, ECS, MRS, etc. He is the Technical Program Chair in ICICDT (2019, 2022, 2023, 2024) and Sub-committee Chair in ICICDT (2021) and EDTM (2022, 2023, 2025, 2026, 2027), and in the technical committees of IEDM (2021, 2022), IMW (2025, 2026, 2027), VLSI-TSA (2022, 2023, 2024, 2025, 2026, 2027), ECS (2014, 2016, 2018, 2020, 2022, 2024), ICMAT (2017), EDTM (2017 to 2021), IWJT (2021, 2023, 2025), IRPS (2026, 2027), IPFA (2026), etc. He is the Editor of IEEE Electron Device Letters.