Presentation of the Key Evidence and Main Findings Regarding PFAS use in the Semiconductor Industry

Supika Mashiro
Sr. Expert
Tokyo Electron Limited

Abstract
The presentaion discusses in-depth the key aspects and technical evidence regarding the use of PFAS in the semiconductor sector, specifically focusing on articles comosing semiconductor manufacturing equipment as well as chemicals used for supporting the operation of semiconductor manufacturing equipment to describe the potential impact of a PFAS restriction

Biography
Supika MashiroSr. Expert/ Development Strategic Dept., Tokyo Electron LTD.Ms. Mashiro started to take part in SEMI Standard activities in EH&S from 1997. Since 2001, she’s been serving as a co-chair for Japan Chapter of EH&S global Technical Committee. She received International Collaboration Award and Karel Urbanek Award for her contribution to SEMI Standards in 2001’ and 2006’ respectively.In addition to SEMI Standards, she has been involved in SEMI EHS regulatory advocacy activities since 2006, when EU RoHS Directive became effective, to develop whitepaper for the semiconductor manufacturing equipment suppliers and their supply chain. She has been an active contributor to various SEMI EHS WGs including PFAS WG.